레이저간섭계형 변위센서의 안정화기구에 관한 연구
A Study on the Stabilizer for Laser Interferometry Displacement Sensor
- 주제(KDC) 040.000
- 발행기관 東新大學校
- 발행년도 1993
- 총서유형 Journal
- 본문언어 한국어
초록/요약
The stabilizer for laser interferometry displacement sensor has been designed and developed in order to measure the submicro-displacement produced by the elastic wave. The stabilizer operates to compensate the optical path disturbances due to the environmental vibrations using the reference mirror driven by piezoelectric actuator. The sensitivity and linearity of the constructed stabilizer were evaluated. The variations of operating point was not more than 2%. The minimum detectable displacement was 0.32nm at the 10MHz band width and 0.025nm at the 1MHz band width.
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